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Cover image for product 0471181722
Tompkins
ISBN: 978-0-471-18172-9
Hardcover
248 pages
April 1999
This is an out of stock title.
  • Description
  • Table of Contents
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
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