Introduction
Fundamentals of ion-solid interactions with a focus on the nanoscale
Channelling and blocking
1D layers: Limits to depth resolution
2D and 3D objects: Aspects of lateral resolution
Porous materials / nanomaterials
Instruments
Grazing incidence RBS
RBS-channelling/blocking
High resolution RBS (magnetic or electrostatic filters)
MEIS
Resonant NRA
The place of nanoIBA in the characterisation forest
Applications
Example of resonances, light element profiling
3D example / quantum dots and nanowires / top down devices
Channelling / defect profiling
Blocking / strain profiling
3D MEIS / Real space structural analysis
Conclusion
