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موضوعات مرتبط
Cover image for product 1848213131
Defay
ISBN: 978-1-84821-313-5
Hardcover
448 pages
October 2011, Wiley-ISTE
List Price: 219.00 USD
30,660,000 IRR / 7,884,000 IRR افزودن به سبد
  • Description
  • Table of Contents
This book describes up-to-date technology applied to high-K materials for More Than Moore applications, i.e. microsystems applied to microelectronics core technologies.
After detailing the basic thermodynamic theory applied to high-K dielectrics thin films including extrinsic effects, this book emphasizes the specificity of thin films. Deposition and patterning technologies are then presented. A whole chapter is dedicated to the major role played in the field by X-Ray Diffraction characterization, and other characterization techniques are also described such as Radio frequency characterization. An in-depth study of the influence of leakage currents is performed together with reliability discussion. Three applicative chapters cover integrated capacitors, variables capacitors and ferroelectric memories. The final chapter deals with a reasonably new research field, multiferroic thin films.
عناوین مرتبط
Dielectrics & Electric Insulators