Microsystems and Mechanics

Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and simulation and reliability.It examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry.

Mechanics of Microsystems is divided in two main parts. The first part offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.