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Cover image for product 0470471557
Bakshi
ISBN: 978-0-470-47155-5
Hardcover
700 pages
January 2009
This is an out of stock title.
  • Description
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
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